JOURNAL ARTICLE

Epitaxial growth of Ge and SiGe on Si substrates

A. Nylandsted Larsen

Year: 2006 Journal:   Materials Science in Semiconductor Processing Vol: 9 (4-5)Pages: 454-459   Publisher: Elsevier BV
Keywords:
Epitaxy Materials science Germanium Molecular beam epitaxy Silicon Optoelectronics Layer (electronics) Chemical vapor deposition Nanotechnology

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59
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17
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0.97
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