Structural investigations of nitrided Nb2O5 and Nb2O5–SiO2 sol–gel derived films

Barbara Kościelska; A. Winiarski

doi:10.1016/j.jnoncrysol.2008.06.049

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Structural investigations of nitrided Nb2O5 and Nb2O5–SiO2 sol–gel derived films

Barbara Kościelska A. Winiarski

Year: 2008 Journal: Journal of Non-Crystalline Solids Vol: 354 (35-39)Pages: 4349-4353 Publisher: Elsevier BV

DOI: 10.1016/j.jnoncrysol.2008.06.049

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Keywords:

X-ray photoelectron spectroscopy Nitriding Materials science Amorphous solid Niobium nitride Niobium Phase (matter) Sol-gel Atomic force microscopy Analytical Chemistry (journal) Grain size Diffraction Crystallography Layer (electronics) Chemical engineering Nitride Nanotechnology Metallurgy Chemistry Optics

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Semiconductor materials and devices

Physical Sciences → Engineering → Electrical and Electronic Engineering

Advanced ceramic materials synthesis

Physical Sciences → Materials Science → Ceramics and Composites

Metal and Thin Film Mechanics

Physical Sciences → Engineering → Mechanics of Materials

Structural investigations of nitrided Nb2O5 and Nb2O5–SiO2 sol–gel derived films

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