Ablation of metal thin films using femtosecond laser Bessel vortex beams

Ramazan Şahin; Tansu Ersoy; Selçuk Aktürk

doi:10.1007/s00339-014-8808-2

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Ablation of metal thin films using femtosecond laser Bessel vortex beams

Ramazan Şahin Tansu Ersoy Selçuk Aktürk

Year: 2014 Journal: Applied Physics A Vol: 118 (1)Pages: 125-129 Publisher: Springer Science+Business Media

DOI: 10.1007/s00339-014-8808-2

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Keywords:

Bessel beam Femtosecond Optics Bessel function Materials science Laser Fluence Ablation Wavelength Beam (structure) Diffraction Laser ablation Optical vortex Nanolithography Fabrication Physics

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Laser Material Processing Techniques

Physical Sciences → Engineering → Computational Mechanics

Laser-induced spectroscopy and plasma

Physical Sciences → Engineering → Mechanics of Materials

Laser-Matter Interactions and Applications

Physical Sciences → Physics and Astronomy → Atomic and Molecular Physics, and Optics

Ablation of metal thin films using femtosecond laser Bessel vortex beams

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