JOURNAL ARTICLE
Resorcinol–formaldehyde aerogels for CMOS-MEMS capacitive humidity sensor
Vincent P. J. ChungMing‐Chuen YipWeileun Fang
Year: 2015 Journal: Sensors and Actuators B Chemical Vol: 214 Pages: 181-188 Publisher: Elsevier BV
Keywords:
Materials science Humidity Aerogel Capacitive sensing Relative humidity Resorcinol Microelectromechanical systems Capacitance Optoelectronics Composite material Electrical engineering Electrode Chemistry
Metrics
33
Cited By
1.00
FWCI (Field Weighted Citation Impact)
29
Refs
0.82
Citation Normalized Percentile
Is in top 1%
Is in top 10%
Citation History
Topics
Gas Sensing Nanomaterials and Sensors
Physical Sciences → Engineering → Electrical and Electronic Engineering
Advanced Sensor and Energy Harvesting Materials
Physical Sciences → Engineering → Biomedical Engineering
Aerogels and thermal insulation
Physical Sciences → Chemistry → Spectroscopy
Related Documents
JOURNAL ARTICLE
CMOS-MEMS Capacitive Humidity Sensor
Nathan LazarusSarah S. BedairChieh-Pu LoGary K. Fedder
Year: 2009 Pages: 268-271
JOURNAL ARTICLE
CMOS-MEMS Capacitive Humidity Sensor
Nathan LazarusSarah S. BedairChiung-C. LoGary K. Fedder
Journal: Journal of Microelectromechanical Systems Year: 2009 Vol: 19 (1)Pages: 183-191
BOOK-CHAPTER
Resorcinol–Formaldehyde Aerogels
Sudhir MulikChariklia Sotiriou‐Leventis
Year: 2011 Pages: 215-234
JOURNAL ARTICLE
Designing a robust high-speed CMOS-MEMS capacitive humidity sensor
Journal: Journal of Micromechanics and Microengineering Year: 2012 Vol: 22 (8)Pages: 085021-085021
JOURNAL ARTICLE
A CMOS MEMS Humidity Sensor Enhanced by a Capacitive Coupling Structure
Jianqiu HuangBaoye LiWenhao Chen
Journal: Micromachines Year: 2016 Vol: 7 (5)Pages: 74-74