Epitaxial Al and Cu films grown on CaF<sub>2</sub>/Si(111)

Y. Shusterman; N.L. Yakovlev; K. Dovidenko; L. J. Schowalter

doi:10.1557/proc-648-p11.38

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Epitaxial Al and Cu films grown on CaF₂/Si(111)

Y. Shusterman N.L. Yakovlev K. Dovidenko L. J. Schowalter

Year: 2000 Journal: MRS Proceedings Vol: 648 Publisher: Cambridge University Press

DOI: 10.1557/proc-648-p11.38

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Keywords:

Materials science Epitaxy Electrical resistivity and conductivity Thin film Microstructure Electron diffraction Scattering Transmission electron microscopy Grain boundary Diffraction Layer (electronics) Composite material Condensed matter physics Optics Nanotechnology

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Copper Interconnects and Reliability

Physical Sciences → Materials Science → Electronic, Optical and Magnetic Materials

Semiconductor materials and devices

Physical Sciences → Engineering → Electrical and Electronic Engineering

Metal and Thin Film Mechanics

Physical Sciences → Engineering → Mechanics of Materials

Epitaxial Al and Cu films grown on CaF₂/Si(111)

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