JOURNAL ARTICLE

Epitaxial Al and Cu films grown on CaF2/Si(111)

Keywords:
Materials science Epitaxy Electrical resistivity and conductivity Thin film Microstructure Electron diffraction Scattering Transmission electron microscopy Grain boundary Diffraction Layer (electronics) Composite material Condensed matter physics Optics Nanotechnology

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Topics

Copper Interconnects and Reliability
Physical Sciences →  Materials Science →  Electronic, Optical and Magnetic Materials
Semiconductor materials and devices
Physical Sciences →  Engineering →  Electrical and Electronic Engineering
Metal and Thin Film Mechanics
Physical Sciences →  Engineering →  Mechanics of Materials

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