<title>Fabrication of photonic crystals in multilayer organic films</title>

Abstract

We present a novel method for making 2D photonic crystal structures. The method relies on exposing a multilayer electron beam resist. The different layers exhibit different dissolution rates in the developer, which makes it possible to produce a perforated membrane released from the substrate if the resist closest to the substrate has a higher dissolution rate than the resist on the surface. The entire structure is created in a single development step. Various structures fabricated with this method are reported.