Piezoelectric Thin Films Characterization for MEMS Applications

Abstract

Piezoelectric materials have a strong interaction between the mechanical and electrical properties that translates into innovative components and circuits architectures. A novel technique for the determination of the piezoelectric coefficients d 31 is introduced. The technique utilize the interaction between mechanical and electrical properties in piezoelectric material. Both; the classical parallel capacitance plate analysis and piezoelectric coefficient to be determined. The values of d 31 obtained experimentally is found to be similar to those that have been determined by more elaborate methods.