Batch fabricated flexible tactile sensor based on carbon nanotube-polymer composites

Abstract

We developed a batch-processed, flexible tactile sensor using carbon nanotube (CNT)-polymer composites. The fabricated sensor consists of a flexible substrate (polyimide), four flexible sensing parts (CNT-polymer composites) and a bump structure (SU-8). CNT-polymer composite was patterned on polyimide substrate through large area screen printing process. The proposed sensor structure has advantages in high sensitivity, mechanical flexibility and facile fabrication process. It showed outstanding piezoresistive characteristics in the pressure range up to 2 N.