Fabrication of a surface stress-based PDMS micro-membrane biosensor

Shengbo Sang; Hartmut Witte

doi:10.1007/s00542-010-1077-x

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Fabrication of a surface stress-based PDMS micro-membrane biosensor

Shengbo Sang Hartmut Witte

Year: 2010 Journal: Microsystem Technologies Vol: 16 (6)Pages: 1001-1008 Publisher: Springer Science+Business Media

DOI: 10.1007/s00542-010-1077-x

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Keywords:

Microfabrication Polydimethylsiloxane Biosensor Fabrication Nanotechnology Materials science Microfluidics Membrane Surface stress Microelectromechanical systems Composite material Chemistry Surface energy

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Advanced MEMS and NEMS Technologies

Physical Sciences → Engineering → Electrical and Electronic Engineering

Mechanical and Optical Resonators

Physical Sciences → Physics and Astronomy → Atomic and Molecular Physics, and Optics

Nanofabrication and Lithography Techniques

Physical Sciences → Engineering → Biomedical Engineering

Fabrication of a surface stress-based PDMS micro-membrane biosensor

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