Catastrophic Au-Si eutectic formation in certain W/Au metallizations on oxidized silicon wafers

A. K. Sinha

doi:10.1016/0040-6090(74)90039-x

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Catastrophic Au-Si eutectic formation in certain W/Au metallizations on oxidized silicon wafers

A. K. Sinha

Year: 1974 Journal: Thin Solid Films Vol: 20 (1)Pages: 115-122 Publisher: Elsevier BV

DOI: 10.1016/0040-6090(74)90039-x

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Keywords:

Eutectic system Materials science Silicon Wafer Layer (electronics) Metallizing Metal Composite material Optoelectronics Metallurgy Nanotechnology Microstructure

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Semiconductor materials and interfaces

Physical Sciences → Physics and Astronomy → Atomic and Molecular Physics, and Optics

Silicon and Solar Cell Technologies

Physical Sciences → Engineering → Electrical and Electronic Engineering

Metallic Glasses and Amorphous Alloys

Physical Sciences → Engineering → Mechanical Engineering

Catastrophic Au-Si eutectic formation in certain W/Au metallizations on oxidized silicon wafers

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