Fabrication of microchannels in single-crystal GaN by wet-chemical-assisted femtosecond-laser ablation

S. Nakashima; Koji Sugioka; Katsumi Midorikawa

doi:10.1016/j.apsusc.2009.04.159

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Fabrication of microchannels in single-crystal GaN by wet-chemical-assisted femtosecond-laser ablation

S. Nakashima Koji Sugioka Katsumi Midorikawa

Year: 2009 Journal: Applied Surface Science Vol: 255 (24)Pages: 9770-9774 Publisher: Elsevier BV

DOI: 10.1016/j.apsusc.2009.04.159

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Keywords:

Materials science Ablation Fluence Laser ablation Laser Fabrication Femtosecond Isotropic etching Gallium nitride Optoelectronics Etching (microfabrication) Substrate (aquarium) Optics Nanotechnology Layer (electronics)

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Laser Material Processing Techniques

Physical Sciences → Engineering → Computational Mechanics

Advanced Fiber Laser Technologies

Physical Sciences → Physics and Astronomy → Atomic and Molecular Physics, and Optics

Laser-induced spectroscopy and plasma

Physical Sciences → Engineering → Mechanics of Materials

Fabrication of microchannels in single-crystal GaN by wet-chemical-assisted femtosecond-laser ablation

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