MOEMS translatory actuator characterisation, position encoding and closed-loop control

M. Lenzhofer; Andreas Tortschanoff; A. Frank; T. Sandner; Harald Schenk; Martin Kraft; A. Kenda

doi:10.1007/s00542-010-1029-5

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MOEMS translatory actuator characterisation, position encoding and closed-loop control

M. Lenzhofer Andreas Tortschanoff A. Frank T. Sandner Harald Schenk Martin Kraft A. Kenda

Year: 2010 Journal: Microsystem Technologies Vol: 16 (5)Pages: 901-907 Publisher: Springer Science+Business Media

DOI: 10.1007/s00542-010-1029-5

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Keywords:

Actuator Microelectromechanical systems SIGNAL (programming language) Interference (communication) Position (finance) Computer science Optical path Interferometry Position sensor Control system Electronic engineering Optics Engineering Physics Electrical engineering Artificial intelligence Telecommunications Optoelectronics

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Advanced MEMS and NEMS Technologies

Physical Sciences → Engineering → Electrical and Electronic Engineering

Geophysics and Sensor Technology

Physical Sciences → Engineering → Ocean Engineering

MOEMS translatory actuator characterisation, position encoding and closed-loop control

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