JOURNAL ARTICLE

MOEMS translatory actuator characterisation, position encoding and closed-loop control

M. LenzhoferAndreas TortschanoffA. FrankT. SandnerHarald SchenkMartin KraftA. Kenda

Year: 2010 Journal:   Microsystem Technologies Vol: 16 (5)Pages: 901-907   Publisher: Springer Science+Business Media
Keywords:
Actuator Microelectromechanical systems SIGNAL (programming language) Interference (communication) Position (finance) Computer science Optical path Interferometry Position sensor Control system Electronic engineering Optics Engineering Physics Electrical engineering Artificial intelligence Telecommunications Optoelectronics

Metrics

3
Cited By
0.26
FWCI (Field Weighted Citation Impact)
12
Refs
0.64
Citation Normalized Percentile
Is in top 1%
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Citation History

Topics

Advanced MEMS and NEMS Technologies
Physical Sciences →  Engineering →  Electrical and Electronic Engineering
Geophysics and Sensor Technology
Physical Sciences →  Engineering →  Ocean Engineering

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