JOURNAL ARTICLE
Mechanical calibration of MEMS springs with sub-micro-Newton force resolution
Kenji MiyamotoTomoya JomoriKoji SuganoOsamu TabataToshiyuki Tsuchiya
Year: 2007 Journal: Sensors and Actuators A Physical Vol: 143 (1)Pages: 136-142 Publisher: Elsevier BV
Keywords:
Microelectromechanical systems Spring (device) Calibration Stiffness Wafer Beam (structure) Materials science Silicon on insulator Restoring force Silicon Optics Mechanical engineering Optoelectronics Composite material Physics Engineering
Metrics
16
Cited By
1.24
FWCI (Field Weighted Citation Impact)
9
Refs
0.82
Citation Normalized Percentile
Is in top 1%
Is in top 10%
Citation History
Topics
Advanced MEMS and NEMS Technologies
Physical Sciences → Engineering → Electrical and Electronic Engineering
Mechanical and Optical Resonators
Physical Sciences → Physics and Astronomy → Atomic and Molecular Physics, and Optics
Force Microscopy Techniques and Applications
Physical Sciences → Physics and Astronomy → Atomic and Molecular Physics, and Optics
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