JOURNAL ARTICLE

Structural characterization of sputtered indium oxide films deposited at room temperature

Keywords:
Indium Annealing (glass) Nanocrystalline material Materials science Crystallinity Oxide Sputtering Indium tin oxide Thin film Sputter deposition Argon Grain size Analytical Chemistry (journal) Chemical engineering Metallurgy Inorganic chemistry Nanotechnology Chemistry Composite material

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25
Cited By
0.62
FWCI (Field Weighted Citation Impact)
18
Refs
0.68
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Citation History

Topics

ZnO doping and properties
Physical Sciences →  Materials Science →  Materials Chemistry
Gas Sensing Nanomaterials and Sensors
Physical Sciences →  Engineering →  Electrical and Electronic Engineering
Ga2O3 and related materials
Physical Sciences →  Materials Science →  Electronic, Optical and Magnetic Materials
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