Synthesis of the Thermoelectric Thin Films of Ca₃Co₄O₉ and Ca₃Co₂O₆ Using Pulsed-Laser Deposition Techniques

Abstract

Thermoelectric ceramic targets of Ca 3 Co 4 O 9 and Ca 3 Co 2 O 6 were prepared by the sol-gel method. The technology and mechanism of synthesizing the thermoelectric thin films of Ca 3 Co 4 O 9 and Ca 3 Co 2 O 6 were investigated. The thin films of Ca 3 Co 4 O 9 and Ca 3 Co 2 O 6 were grown on (0001)-oriented (c-cut) Al 2 O 3 substrates by pulsed-laser deposition techniques (PLD). Ca 3 Co 4 O 9 thin films grown at substrate temperature of 700°C and 800 °C appear to be obviously c-axis-oriented. But the x-ray diffraction peak of Ca 3 Co 2 O 6 thin films was not confirmed. Ca 3 Co 4 O 9 thin films and Ca 3 Co 2 O 6 thin films exhibited Ca elements and Co elements volatilization at high temperatures.