Epitaxial growth of dielectric SrTiO3 thin films by pulsed laser deposition

Tao Yu; Yan‐Feng Chen; Zhiguo Liu; Nai‐Ben Ming; Xiaoshan Wu

doi:10.1016/s0169-4332(98)00460-7

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Epitaxial growth of dielectric SrTiO3 thin films by pulsed laser deposition

Tao Yu Yan‐Feng Chen Zhiguo Liu Nai‐Ben Ming Xiaoshan Wu

Year: 1999 Journal: Applied Surface Science Vol: 138-139 Pages: 605-608 Publisher: Elsevier BV

DOI: 10.1016/s0169-4332(98)00460-7

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Keywords:

Pulsed laser deposition Epitaxy Materials science X-ray photoelectron spectroscopy Thin film Dielectric Perovskite (structure) Optoelectronics Deposition (geology) Oxide Crystal growth Diffraction Analytical Chemistry (journal) Chemical engineering Nanotechnology Optics Crystallography Chemistry Layer (electronics) Metallurgy Organic chemistry

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Electronic and Structural Properties of Oxides

Physical Sciences → Materials Science → Materials Chemistry

Semiconductor materials and devices

Physical Sciences → Engineering → Electrical and Electronic Engineering

Metal and Thin Film Mechanics

Physical Sciences → Engineering → Mechanics of Materials

Epitaxial growth of dielectric SrTiO3 thin films by pulsed laser deposition

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