This paper studied a triboelectric and piezoelectric coupling nanogenerator based on MEMS technology. The electrospinning PVDF-TrFE nanofibers are not only used as a piezoelectric functional layer, but also as a friction layer of triboelectric generator. The other flexible friction layer is realized by PDMS films with doped multiwall carbon nanotubes (MWCNT). The sandwich-shaped nanogenerator's triboelectric output peak voltage, piezoelectric output peak voltage, triboelectric energy power, piezoelectric energy power, triboelectric energy volume power density and piezoelectric energy volume power density are 5V, 30V, 98.66μW, 9.74μW, 1.98mW/cm 3 and 0.689mW/cm 3 under the pressure force of 5 N, respectively. This device has some advantages such as flexibility, thickness controllability, double coupling mechanisms.
Sujian YouLingling ZhangJinzheng GuiHeng CuiShishang Guo
Haiyang HuWei LiXingjia LiYancheng XuXiaoming ZhaoXiaoyue HuangShenglan HaoGuangdi FengQiuxiang ZhuXiuli ZhangChun‐Gang DuanJunhao ChuBobo Tian
Xuexian ChenMengdi HanHaotian ChenXiaoliang ChengYu SongZongming SuYonggang JiangHaixia Zhang
Xingzhao WangBin YangJingquan LiuYanbo ZhuChunsheng YangQing He