JOURNAL ARTICLE
Novel porous silicon integrated optical devices for sensing applications
Zhixuan XiaAli A. EftekharStanley C. DavisKen H. SandhageAli Adibi
Year: 2011 Vol: 446 Pages: 545-546
Abstract
The design, fabrication, and characterization of novel integrated optical sensors comprised of nanoporous silicon are presented. This work lays foundation for a new class of planar integrated photonic sensors with high sensitivity.
Keywords:
Silicon photonics Planar Fabrication Materials science Silicon Porous silicon Photonics Integrated optics Sensitivity (control systems) Nanoporous Optical sensing Characterization (materials science) Optoelectronics Nanotechnology Electronic engineering Computer science Engineering
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Topics
Silicon Nanostructures and Photoluminescence
Physical Sciences → Materials Science → Materials Chemistry
Nanowire Synthesis and Applications
Physical Sciences → Engineering → Biomedical Engineering
Photonic and Optical Devices
Physical Sciences → Engineering → Electrical and Electronic Engineering
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