Precise ultrafast laser micromachining in thin-film CIGS photovoltaic modules

Tien-Li Chang; Chien‐Yu Chen; Chien-Ping Wang

doi:10.1016/j.mee.2013.02.072

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JOURNAL ARTICLE

Precise ultrafast laser micromachining in thin-film CIGS photovoltaic modules

Tien-Li Chang Chien‐Yu Chen Chien-Ping Wang

Year: 2013 Journal: Microelectronic Engineering Vol: 110 Pages: 381-385 Publisher: Elsevier BV

DOI: 10.1016/j.mee.2013.02.072

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Keywords:

Copper indium gallium selenide solar cells Materials science Surface micromachining Photovoltaic system Optoelectronics Laser Ultrashort pulse Femtosecond Laser ablation Laser beam machining Thin film Machining Optics Fabrication Solar cell Nanotechnology Laser beams Electrical engineering

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Laser Material Processing Techniques

Physical Sciences → Engineering → Computational Mechanics

Ocular and Laser Science Research

Health Sciences → Medicine → Ophthalmology

Chalcogenide Semiconductor Thin Films

Physical Sciences → Engineering → Electrical and Electronic Engineering

Precise ultrafast laser micromachining in thin-film CIGS photovoltaic modules

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