JOURNAL ARTICLE

Microcantilever hotplates with temperature-compensated piezoresistive strain sensors

Fabian T. GoerickeJungchul LeeWilliam P. King

Year: 2007 Journal:   Sensors and Actuators A Physical Vol: 143 (2)Pages: 181-190   Publisher: Elsevier BV
Keywords:
Piezoresistive effect Cantilever Materials science Deflection (physics) Temperature coefficient Fabrication Resistive touchscreen Strain gauge Optoelectronics Compensation (psychology) Composite material Electrical engineering Optics Physics

Metrics

24
Cited By
2.39
FWCI (Field Weighted Citation Impact)
43
Refs
0.90
Citation Normalized Percentile
Is in top 1%
Is in top 10%

Citation History

Topics

Force Microscopy Techniques and Applications
Physical Sciences →  Physics and Astronomy →  Atomic and Molecular Physics, and Optics
Mechanical and Optical Resonators
Physical Sciences →  Physics and Astronomy →  Atomic and Molecular Physics, and Optics
Advanced MEMS and NEMS Technologies
Physical Sciences →  Engineering →  Electrical and Electronic Engineering

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