Microcantilever hotplates with temperature-compensated piezoresistive strain sensors

Fabian T. Goericke; Jungchul Lee; William P. King

doi:10.1016/j.sna.2007.10.049

ScienceGate Book Chapters

JOURNAL ARTICLE

Microcantilever hotplates with temperature-compensated piezoresistive strain sensors

Fabian T. Goericke Jungchul Lee William P. King

Year: 2007 Journal: Sensors and Actuators A Physical Vol: 143 (2)Pages: 181-190 Publisher: Elsevier BV

DOI: 10.1016/j.sna.2007.10.049

Get Full-Text PDF Get Analytical Report

Keywords:

Piezoresistive effect Cantilever Materials science Deflection (physics) Temperature coefficient Fabrication Resistive touchscreen Strain gauge Optoelectronics Compensation (psychology) Composite material Electrical engineering Optics Physics

Metrics

Cited By

2.39

FWCI (Field Weighted Citation Impact)

Refs

0.90

Citation Normalized Percentile

Is in top 1%

Is in top 10%

Citation History

Topics

Force Microscopy Techniques and Applications

Physical Sciences → Physics and Astronomy → Atomic and Molecular Physics, and Optics

Mechanical and Optical Resonators

Physical Sciences → Physics and Astronomy → Atomic and Molecular Physics, and Optics

Advanced MEMS and NEMS Technologies

Physical Sciences → Engineering → Electrical and Electronic Engineering

Microcantilever hotplates with temperature-compensated piezoresistive strain sensors

Metrics

Citation History

Topics

Related Documents

Microthermogravimetry using a microcantilever hot plate with integrated temperature-compensated piezoresistive strain sensors

Silicon microcantilever hotplates with high temperature uniformity

A novel method of temperature compensation for piezoresistive microcantilever-based sensors

Gas sensing using embedded piezoresistive microcantilever sensors

Piezoresistive Strain Sensors