Dual-frequency laser optical feedback displacement measurement system with nanometer resolution

Li Zhang; Zhou Lu-Fei; Yidong Tan; Shulian Zhang

doi:10.3724/sp.j.1187.2009.04007

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Dual-frequency laser optical feedback displacement measurement system with nanometer resolution

Li Zhang Zhou Lu-Fei Yidong Tan Shulian Zhang

Year: 2009 Journal: JOURNAL OF ELECTRONIC MEASUREMENT AND INSTRUMENT Vol: 2009 (4)Pages: 7-12 Publisher: Science Press

DOI: 10.3724/sp.j.1187.2009.04007

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Keywords:

Nanometre Displacement (psychology) Laser Resolution (logic) Optics Materials science Dual (grammatical number) Optoelectronics Physics Computer science

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Semiconductor Lasers and Optical Devices

Physical Sciences → Engineering → Electrical and Electronic Engineering

Photonic and Optical Devices

Physical Sciences → Engineering → Electrical and Electronic Engineering

Advanced Measurement and Metrology Techniques

Physical Sciences → Engineering → Mechanical Engineering

Dual-frequency laser optical feedback displacement measurement system with nanometer resolution

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