Megasonic Sweeping and Silicon Wafer Cleaning

J. Michael Goodson; R. Nagarajan

doi:10.4028/www.scientific.net/ssp.145-146.27

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JOURNAL ARTICLE

Megasonic Sweeping and Silicon Wafer Cleaning

J. Michael Goodson R. Nagarajan

Year: 2009 Journal: Diffusion and defect data, solid state data. Part B, Solid state phenomena/Solid state phenomena Vol: 145-146 Pages: 27-30 Publisher: Scientific.net

DOI: 10.4028/www.scientific.net/ssp.145-146.27

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Keywords:

Wafer Materials science Silicon Dry cleaning Metallurgy Optoelectronics Engineering physics Composite material Forensic engineering Waste management Engineering

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Advanced Surface Polishing Techniques

Physical Sciences → Engineering → Biomedical Engineering

Megasonic Sweeping and Silicon Wafer Cleaning

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