JOURNAL ARTICLE

Megasonic Sweeping and Silicon Wafer Cleaning

J. Michael GoodsonR. Nagarajan

Year: 2009 Journal:   Diffusion and defect data, solid state data. Part B, Solid state phenomena/Solid state phenomena Vol: 145-146 Pages: 27-30   Publisher: Scientific.net
Keywords:
Wafer Materials science Silicon Dry cleaning Metallurgy Optoelectronics Engineering physics Composite material Forensic engineering Waste management Engineering

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0
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0.60
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Citation History

Topics

Advanced Surface Polishing Techniques
Physical Sciences →  Engineering →  Biomedical Engineering

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