Integrated grating-type Schottky-barrier photodetector with optical channel waveguide

Abstract

A grating-type Schottky-barrier photodetector has been incorporated within an optical channel waveguide. Silicon is used as the base material for future integration of optical and electronic components. The fabrication processes are simple and completely compatible with the standard silicon planar technology. Estimated responsivity of the detector is 0.33 μA/μW at a wavelength of 0.6328 μm with nanosecond response time.