CMOS compatible Multiple Power-Output MEMS Radioisotope μ-Power Generator

Abstract

The authors demonstrate a novel 6.6% high-efficiency CMOS compatible piezoelectric aluminum nitride (AlN) thin-film based integrated β-radioisotope-powered electro-mechanical power generator (IREMPG). the authors integrate silicon betavoltaics with radioisotope actuated piezoelectric unimorph converters to efficiently utilize both kinetic energy and charge of the emitted beta particles for electrical power generation. IREMPG has three output ports generating (1) a 2.8MHz pulse remotely detectable up to 6 feet, (2) a 2.95μW low-frequency pulse across 525kΩ, for 2s every 400s, at 4.4% efficiency, and (3) 400pW-700pW average continuous power across 33MΩ at 2.78% maximum efficiency. Individual IREMPGs can be arrayed in series or parallel configurations for higher power output, and used to power low-power sensor network nodes