JOURNAL ARTICLE

Comparison of chromium nitride coatings deposited by DC and RF magnetron sputtering

Shuyong TanXuhai ZhangXiangjun WuFeng FangJianqing Jiang

Year: 2010 Journal:   Thin Solid Films Vol: 519 (7)Pages: 2116-2120   Publisher: Elsevier BV
Keywords:
Materials science Chromium nitride Sputter deposition Sputtering Metallurgy Nitride Microstructure Coating Chromium Cavity magnetron Pulsed DC Deposition (geology) Substrate (aquarium) Physical vapor deposition Thin film Composite material Layer (electronics) Nanotechnology

Metrics

34
Cited By
3.86
FWCI (Field Weighted Citation Impact)
28
Refs
0.92
Citation Normalized Percentile
Is in top 1%
Is in top 10%

Citation History

Topics

Metal and Thin Film Mechanics
Physical Sciences →  Engineering →  Mechanics of Materials
Diamond and Carbon-based Materials Research
Physical Sciences →  Materials Science →  Materials Chemistry
Semiconductor materials and devices
Physical Sciences →  Engineering →  Electrical and Electronic Engineering

Related Documents

© 2026 ScienceGate Book Chapters — All rights reserved.