JOURNAL ARTICLE

Micro force sensor with piezoresistive amorphous carbon strain gauge

Erwin PeinerA. TibrewalaRalf BandorfSaskia BiehlH. LüthjeLutz Doering

Year: 2006 Journal:   Sensors and Actuators A Physical Vol: 130-131 Pages: 75-82   Publisher: Elsevier BV
Keywords:
Materials science Gauge factor Piezoresistive effect Strain gauge Composite material Raman spectroscopy Silicon Cantilever Nanotechnology Optoelectronics Fabrication Optics

Metrics

69
Cited By
2.76
FWCI (Field Weighted Citation Impact)
24
Refs
0.91
Citation Normalized Percentile
Is in top 1%
Is in top 10%

Citation History

Topics

Force Microscopy Techniques and Applications
Physical Sciences →  Physics and Astronomy →  Atomic and Molecular Physics, and Optics
Mechanical and Optical Resonators
Physical Sciences →  Physics and Astronomy →  Atomic and Molecular Physics, and Optics
Diamond and Carbon-based Materials Research
Physical Sciences →  Materials Science →  Materials Chemistry
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