Micro force sensor with piezoresistive amorphous carbon strain gauge

Erwin Peiner; A. Tibrewala; Ralf Bandorf; Saskia Biehl; H. Lüthje; Lutz Doering

doi:10.1016/j.sna.2005.11.059

ScienceGate Book Chapters

JOURNAL ARTICLE

Micro force sensor with piezoresistive amorphous carbon strain gauge

Erwin Peiner A. Tibrewala Ralf Bandorf Saskia Biehl H. Lüthje Lutz Doering

Year: 2006 Journal: Sensors and Actuators A Physical Vol: 130-131 Pages: 75-82 Publisher: Elsevier BV

DOI: 10.1016/j.sna.2005.11.059

Get Full-Text PDF Get Analytical Report

Keywords:

Materials science Gauge factor Piezoresistive effect Strain gauge Composite material Raman spectroscopy Silicon Cantilever Nanotechnology Optoelectronics Fabrication Optics

Metrics

Cited By

2.76

FWCI (Field Weighted Citation Impact)

Refs

0.91

Citation Normalized Percentile

Is in top 1%

Is in top 10%

Citation History

Topics

Force Microscopy Techniques and Applications

Physical Sciences → Physics and Astronomy → Atomic and Molecular Physics, and Optics

Mechanical and Optical Resonators

Physical Sciences → Physics and Astronomy → Atomic and Molecular Physics, and Optics

Diamond and Carbon-based Materials Research

Physical Sciences → Materials Science → Materials Chemistry

Micro force sensor with piezoresistive amorphous carbon strain gauge

Metrics

Citation History

Topics

Related Documents

Micro force sensor with piezoresistive amorphous carbon strain gauge

3D Printed Force Sensor with Inkjet Printed Piezoresistive Based Strain Gauge

Strain-gauge force sensor

Micro endeffector with micro pyramids and integrated piezoresistive force sensor

Piezoresistive gauge factor of hydrogenated amorphous carbon films