Hydrogen sensing properties of Pd-doped SnO2 sputtered films with columnar nanostructures

Yanbai Shen; Toshinari Yamazaki; Zhifu Liu; Dan Meng; Toshio Kikuta

doi:10.1016/j.tsf.2009.05.036

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Hydrogen sensing properties of Pd-doped SnO2 sputtered films with columnar nanostructures

Yanbai Shen Toshinari Yamazaki Zhifu Liu Dan Meng Toshio Kikuta

Year: 2009 Journal: Thin Solid Films Vol: 517 (21)Pages: 6119-6123 Publisher: Elsevier BV

DOI: 10.1016/j.tsf.2009.05.036

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Keywords:

Tetragonal crystal system Materials science Doping Sputtering Scanning electron microscope Nanostructure Substrate (aquarium) Thin film Analytical Chemistry (journal) Sputter deposition Hydrogen Operating temperature Porosity Nanotechnology Composite material Crystallography Optoelectronics Chemistry Crystal structure

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Gas Sensing Nanomaterials and Sensors

Physical Sciences → Engineering → Electrical and Electronic Engineering

ZnO doping and properties

Physical Sciences → Materials Science → Materials Chemistry

Analytical Chemistry and Sensors

Physical Sciences → Chemical Engineering → Bioengineering

Hydrogen sensing properties of Pd-doped SnO2 sputtered films with columnar nanostructures

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