Nanoscale Structures by Laser Direct Writing in Silicon

H. Dirac; Matthias Müllenborn; J. W. Petersen

doi:10.1557/proc-380-43

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Nanoscale Structures by Laser Direct Writing in Silicon

H. Dirac Matthias Müllenborn J. W. Petersen

Year: 1995 Journal: MRS Proceedings Vol: 380 Publisher: Cambridge University Press

DOI: 10.1557/proc-380-43

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Keywords:

Materials science Laser Silicon Trench Optics Etching (microfabrication) Nanoscopic scale Resolution (logic) Laser power scaling Optoelectronics Nanotechnology

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Topics

Laser Material Processing Techniques

Physical Sciences → Engineering → Computational Mechanics

Laser-induced spectroscopy and plasma

Physical Sciences → Engineering → Mechanics of Materials

Ion-surface interactions and analysis

Physical Sciences → Engineering → Computational Mechanics

Nanoscale Structures by Laser Direct Writing in Silicon

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