JOURNAL ARTICLE

Nanoscale Structures by Laser Direct Writing in Silicon

H. DiracMatthias MüllenbornJ. W. Petersen

Year: 1995 Journal:   MRS Proceedings Vol: 380   Publisher: Cambridge University Press
Keywords:
Materials science Laser Silicon Trench Optics Etching (microfabrication) Nanoscopic scale Resolution (logic) Laser power scaling Optoelectronics Nanotechnology

Metrics

1
Cited By
0.51
FWCI (Field Weighted Citation Impact)
13
Refs
0.65
Citation Normalized Percentile
Is in top 1%
Is in top 10%

Topics

Laser Material Processing Techniques
Physical Sciences →  Engineering →  Computational Mechanics
Laser-induced spectroscopy and plasma
Physical Sciences →  Engineering →  Mechanics of Materials
Ion-surface interactions and analysis
Physical Sciences →  Engineering →  Computational Mechanics

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