Synthesis of Single-Walled Carbon Nanotube Networks on Silicon Nanowires

Abstract

Single-walled carbon nanotubes (SWNTs) have been synthesized on silicon nanowires (SiNWs) by ethanol chemical vapor deposition (CVD) using Co catalysts nanoparticles. The surface SiOx layers assist the formation of catalyst nanoparticles on SiNWs by inhibiting the diffusion of Co to Si. Co-Si compounds have formed in SiNWs readily when the surface SiOx layers are very thin. Therefore, the yield of SWNTs is strongly influenced by the thickness of the surface SiOx layers of SiNWs.