JOURNAL ARTICLE

Sputtered gold films for surface-enhanced Raman scattering

L. MayaC. E. ValletY. H. Lee

Year: 1997 Journal:   Journal of Vacuum Science & Technology A Vacuum Surfaces and Films Vol: 15 (2)Pages: 238-242   Publisher: American Institute of Physics

Abstract

Sputtered gold films in a pure form or as nanocomposites in silica or silicon nitride were screened for surface-enhanced Raman scattering (SERS) activity using Rhodamine 6G as a probe. The films were prepared by sputtering pure gold or solidified Au–Si alloys in plasmas generated in a dc glow discharge apparatus. The plasmas were produced with argon, nitrogen, or argon–oxygen as the sputtering gas to directly deposit gold films or in the latter case a gold oxide intermediate. The alloys produce nanocomposite films in a silicon nitride or silica matrix depending on the plasma gas. SERS activity was detected in some of the films thus leading to a search for the critical parameters that controlled this phenomenon. The films were characterized by profilometry, x-ray diffraction, and atomic force microscopy. SERS activity was found to be correlated to crystallite size in the 10–25 nm range and to roughness larger than 15 nm, and it was independent of film thickness. Sputtered gold films, particularly those containing the gold as a nanocomposite in silica are attractive media for SERS because of excellent adherence, ruggedness, and simplicity in preparation.

Keywords:
Materials science Sputtering Nanocomposite Argon Raman scattering Surface roughness Silicon nitride Silicon Raman spectroscopy Crystallite Rhodamine 6G Thin film Analytical Chemistry (journal) Nanotechnology Chemical engineering Composite material Optoelectronics Optics Metallurgy Chemistry

Metrics

29
Cited By
0.56
FWCI (Field Weighted Citation Impact)
0
Refs
0.64
Citation Normalized Percentile
Is in top 1%
Is in top 10%

Citation History

Topics

Gold and Silver Nanoparticles Synthesis and Applications
Physical Sciences →  Materials Science →  Electronic, Optical and Magnetic Materials
Electronic and Structural Properties of Oxides
Physical Sciences →  Materials Science →  Materials Chemistry
Semiconductor materials and devices
Physical Sciences →  Engineering →  Electrical and Electronic Engineering
© 2026 ScienceGate Book Chapters — All rights reserved.