Flash-evaporated TiNiCu thick film for shape memory alloy micro actuator

Takashi Mineta; Kouji Kasai; Yuki Sasaki; Eiji Makino; Takahiro Kawashima; Takayuki Shibata

doi:10.1016/j.mee.2008.12.032

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Flash-evaporated TiNiCu thick film for shape memory alloy micro actuator

Takashi Mineta Kouji Kasai Yuki Sasaki Eiji Makino Takahiro Kawashima Takayuki Shibata

Year: 2008 Journal: Microelectronic Engineering Vol: 86 (4-6)Pages: 1274-1277 Publisher: Elsevier BV

DOI: 10.1016/j.mee.2008.12.032

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Keywords:

Shape-memory alloy Materials science Actuator SMA* Composite material Alloy Flash (photography) Microelectromechanical systems Flexibility (engineering) Optoelectronics Optics Electrical engineering Computer science

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Shape Memory Alloy Transformations

Physical Sciences → Materials Science → Materials Chemistry

Flash-evaporated TiNiCu thick film for shape memory alloy micro actuator

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