Thermochromic VO2 thin films synthesized by rf-inverted cylindrical magnetron sputtering

J. B. Kana Kana; J.M.B. Ndjaka; P. Owono Ateba; B.D. Ngom; Ncholu Manyala; O. Nemraoui; A.C. Beye; M. Mâaza

doi:10.1016/j.apsusc.2007.12.021

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Thermochromic VO2 thin films synthesized by rf-inverted cylindrical magnetron sputtering

J. B. Kana Kana J.M.B. Ndjaka P. Owono Ateba B.D. Ngom Ncholu Manyala O. Nemraoui A.C. Beye M. Mâaza

Year: 2007 Journal: Applied Surface Science Vol: 254 (13)Pages: 3959-3963 Publisher: Elsevier BV

DOI: 10.1016/j.apsusc.2007.12.021

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Keywords:

Materials science Sputter deposition Sputtering Cathode Physical vapor deposition Cavity magnetron Stoichiometry Thermochromism Deposition (geology) Optoelectronics Nano- Thin film High-power impulse magnetron sputtering Vapour deposition Composite material Nanotechnology Chemistry

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Transition Metal Oxide Nanomaterials

Physical Sciences → Materials Science → Polymers and Plastics

Ga2O3 and related materials

Physical Sciences → Materials Science → Electronic, Optical and Magnetic Materials

Gas Sensing Nanomaterials and Sensors

Physical Sciences → Engineering → Electrical and Electronic Engineering

Thermochromic VO2 thin films synthesized by rf-inverted cylindrical magnetron sputtering

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