Dry and wet etching of luminescent silicon-silicon oxide core shell nanostructures

Mallar Ray; Robert F. Klie; Koushik Banerjee; Siddhartha Sankar Ghosh

doi:10.1109/leos.2009.5343273

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Dry and wet etching of luminescent silicon-silicon oxide core shell nanostructures

Mallar Ray Robert F. Klie Koushik Banerjee Siddhartha Sankar Ghosh

Year: 2009 Pages: 278-279

DOI: 10.1109/leos.2009.5343273

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Keywords:

Silicon Etching (microfabrication) Materials science Nanostructure Silicon oxide Luminescence Core (optical fiber) Optoelectronics Dry etching Oxide Nanotechnology Composite material Metallurgy Silicon nitride

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Silicon Nanostructures and Photoluminescence

Physical Sciences → Materials Science → Materials Chemistry

Nanowire Synthesis and Applications

Physical Sciences → Engineering → Biomedical Engineering

Anodic Oxide Films and Nanostructures

Physical Sciences → Materials Science → Materials Chemistry

Dry and wet etching of luminescent silicon-silicon oxide core shell nanostructures

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