Electrothermally actuated MEMS terahertz metamaterial

Abstract

We present the design, simulation, fabrication and characterization of a continuously tunable Omega-ring teratahertz metamaterial. The tunability of metamaterial is obtained by integrating electrothermal actuator where higher tuning range, larger stroke and enhanced repeatability are possible. The maximum achieved tuning range for the resonant frequency is around 0.30 THz for the input power of 500 mW.