Modeling and Modal Analysis on Capacitive Micromachined Ultrasound Transducers

Abstract

The capacitive micromachined ultrasonic transducers with square and rectangular membranes were modeled for FEM simulation. The membrane is modeled as a thin plate clamped on all sides. Resonant frequencies and vibration modal analysis were carried out. The modes of CMUT with square and rectangular membranes are different. It can be basis for building CMUTs’ structure. Moreover, the resonant frequencies will vary with different side length and ratio of length/width of membrane.