JOURNAL ARTICLE

Porosity and microstructure of plasma deposited TiO2 thin films

Keywords:
Microstructure Adsorption Materials science Quartz crystal microbalance Scanning electron microscope Desorption Porosity Thin film Analytical Chemistry (journal) Chemical engineering Quartz Water vapor Mineralogy Composite material Chemistry Chromatography Nanotechnology Organic chemistry

Metrics

46
Cited By
3.48
FWCI (Field Weighted Citation Impact)
42
Refs
0.94
Citation Normalized Percentile
Is in top 1%
Is in top 10%

Citation History

Topics

ZnO doping and properties
Physical Sciences →  Materials Science →  Materials Chemistry
Surface Modification and Superhydrophobicity
Physical Sciences →  Materials Science →  Surfaces, Coatings and Films
Copper Interconnects and Reliability
Physical Sciences →  Materials Science →  Electronic, Optical and Magnetic Materials

Related Documents

JOURNAL ARTICLE

Microstructure of plasma-deposited SiO2/TiO2 optical films

Stéphane LaroucheH. SzymanowskiJ.E. Klemberg-SapiehaL. MartinůS. C. Gujrathi

Journal:   Journal of Vacuum Science & Technology A Vacuum Surfaces and Films Year: 2004 Vol: 22 (4)Pages: 1200-1207
JOURNAL ARTICLE

Photoelectrochemical properties of plasma-deposited TiO2 thin films

L. M. WilliamsDennis W. Hess

Journal:   Thin Solid Films Year: 1984 Vol: 115 (1)Pages: 13-18
JOURNAL ARTICLE

Microstructure of vacuum-deposited tin thin films

V. Damodara Das

Journal:   Journal of Materials Science Year: 1982 Vol: 17 (9)Pages: 2613-2617
© 2026 ScienceGate Book Chapters — All rights reserved.