Highly sensitive micromachined capacitive pressure sensor with reduced hysteresis and low parasitic capacitance

Thomas Pedersen; Giulio Fragiacomo; Ole Hansen; Erik Vilain Thomsen

doi:10.1016/j.sna.2009.07.013

ScienceGate Book Chapters

JOURNAL ARTICLE

Highly sensitive micromachined capacitive pressure sensor with reduced hysteresis and low parasitic capacitance

Thomas Pedersen Giulio Fragiacomo Ole Hansen Erik Vilain Thomsen

Year: 2009 Journal: Sensors and Actuators A Physical Vol: 154 (1)Pages: 35-41 Publisher: Elsevier BV

DOI: 10.1016/j.sna.2009.07.013

Get Full-Text PDF Get Analytical Report

Keywords:

Capacitive sensing SIGNAL (programming language) Parasitic capacitance Capacitance Materials science Signal conditioning Pressure sensor Hysteresis Optoelectronics Fabrication Sensitivity (control systems) Electrical engineering Electronics Electronic engineering Computer science Engineering Electrode Mechanical engineering Physics

Metrics

Cited By

3.72

FWCI (Field Weighted Citation Impact)

Refs

0.94

Citation Normalized Percentile

Is in top 1%

Is in top 10%

Citation History

Topics

Advanced MEMS and NEMS Technologies

Physical Sciences → Engineering → Electrical and Electronic Engineering

Advanced Sensor and Energy Harvesting Materials

Physical Sciences → Engineering → Biomedical Engineering

Advanced Sensor Technologies Research

Physical Sciences → Engineering → Biomedical Engineering

Highly sensitive micromachined capacitive pressure sensor with reduced hysteresis and low parasitic capacitance

Metrics

Citation History

Topics

Related Documents

A flexible highly sensitive capacitive pressure sensor

Highly sensitive capacitive pressure sensor with elastic metallized sponge

A highly sensitive thin-film capacitive pressure sensor

Highly Sensitive Flexible Capacitive Pressure Sensor with ZnO NW interlayers

Development of a 3D capacitive gyroscope with reduced parasitic capacitance