Characterizing Piezoelectric Cantilevers for Vibration Energy Harvesting under Ambient Conditions

Abstract

We report on measurement and modeling of dynamic energy harvesters based on oscillating piezoelectric cantilevers, along with careful calibration of energy conversion properties of such devices in their dynamic responses. We employ thin-film lead zirconate titanate (PZT)-based cantilevers fabricated by laser micromachining, with efficient proof masses enabled by a heavy alloy with a low melting temperature (65°C) for tuning frequency and damping. By measuring devices with different circuit parameters, and analyzing the energy conversion in time-domain oscillations, we show a model that quantitatively reveals the effects of the loading circuit for energy harvesting. We also show the effects of device dimensions on their vibrations and converted voltage output waveforms. In harvesting vibrational energy through cycles of oscillations (in 80Hz-1kHz devices), energy conversion efficiency as high as 25% has been attained.