JOURNAL ARTICLE
Transparent Conducting Cadmium‐Tin Oxide Films Deposited by RF Sputtering from a CdO ‐ SnO2 Target
Naoyuki MiyataK. MiyakeKenji KogaTetsuya Fukushima
Year: 1980 Journal: Journal of The Electrochemical Society Vol: 127 (4)Pages: 918-920 Publisher: Institute of Physics
Abstract
Transparent conducting films of cadmium‐tin oxide (CTO) were prepared by rf sputtering from a sintered target in an Ar or an atmosphere. The electrical and optical properties of the films were found to depend upon the oxygen concentration in the gas mixture. The films with the lowest resistivity of and high optical transmission of 85% over the visible region were obtained without post‐heat‐treatment.
Keywords:
Cadmium oxide Sputtering Tin oxide Tin Materials science Electrical resistivity and conductivity Cadmium Transparent conducting film Oxide Optoelectronics Oxygen Thin film Metallurgy Nanotechnology Chemistry
Metrics
47
Cited By
4.32
FWCI (Field Weighted Citation Impact)
0
Refs
0.95
Citation Normalized Percentile
Is in top 1%
Is in top 10%
Citation History
Topics
ZnO doping and properties
Physical Sciences → Materials Science → Materials Chemistry
Gas Sensing Nanomaterials and Sensors
Physical Sciences → Engineering → Electrical and Electronic Engineering
Thin-Film Transistor Technologies
Physical Sciences → Engineering → Electrical and Electronic Engineering
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