Whispering gallery modes in zinc-blende AlN microdisks containing non-polar GaN quantum dots

Abstract

Whispering gallery modes (WGMs) were observed in 60 nm thin cubic AlN microdisk resonators containing a single layer of non-polar cubic GaN quantum dots. Freestanding microdisks were patterned by means of electron beam lithography and a two step reactive ion etching process. Micro-photoluminescence spectroscopy investigations were performed for optical characterization. We analyzed the mode spacing for disk diameters ranging from 2-4 μm. Numerical investigations using three dimensional finite difference time domain calculations were in good agreement with the experimental data. Whispering gallery modes of the radial orders 1 and 2 were identified by means of simulated mode field distributions.