JOURNAL ARTICLE

Microwave assisted patterning of vertically aligned carbon nanotubes onto polymer substrates

Erik O. SundenJ. MoonC.P. WongWilliam P. KingSamuel Graham

Year: 2006 Journal:   Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena Vol: 24 (4)Pages: 1947-1950   Publisher: American Institute of Physics

Abstract

This paper presents a low pressure hot embossing method for transferring patterns of vertically aligned carbon nanotubes into thermoplastic substrates. The procedure utilizes the synthesis of carbon nanotubes in discrete patterns on silicon substrates through the vapor liquid solid growth mechanism. The nanotube pattern and silicon stamp is placed on top of a polycarbonate film and locally heated above the glass transition temperature using microwave processing. The weight of the silicon substrate presses the nanotubes into the polycarbonate, resulting in the complete transfer of vertically aligned patterns. The technique is a rapid processing method, which could be used to integrate aligned nanomaterials with MEMS and flexible electronics that are fabricated on a wide range of thermoplastic polymer materials.

Keywords:
Materials science Carbon nanotube Polycarbonate Embossing Silicon Nanotechnology Substrate (aquarium) Thermoplastic Polymer Microelectromechanical systems Nanomaterials Composite material Optoelectronics

Metrics

26
Cited By
2.59
FWCI (Field Weighted Citation Impact)
21
Refs
0.88
Citation Normalized Percentile
Is in top 1%
Is in top 10%

Citation History

Topics

Nanofabrication and Lithography Techniques
Physical Sciences →  Engineering →  Biomedical Engineering
Nanomaterials and Printing Technologies
Physical Sciences →  Engineering →  Electrical and Electronic Engineering
Carbon Nanotubes in Composites
Physical Sciences →  Materials Science →  Materials Chemistry
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