Photomodulated thermoreflectance investigation of semiconducting implanted wafers

JOURNAL ARTICLE

Year: 1998 Journal: Microelectronic Engineering Vol: 40 (3-4)Pages: 251-261 Publisher: Elsevier BV

DOI: 10.1016/s0167-9317(98)00275-5

Keywords:

Wafer Photothermal therapy Materials science Semiconductor Optoelectronics Thermal Semiconductor materials Reflectivity Optics Nanotechnology

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Thermography and Photoacoustic Techniques

Physical Sciences → Engineering → Mechanics of Materials

Laser Material Processing Techniques

Physical Sciences → Engineering → Computational Mechanics

Thermal properties of materials

Physical Sciences → Materials Science → Materials Chemistry