Transparent conducting V-co-doped AZO thin films prepared by magnetron sputtering

Shingo Suzuki; Toshihiro Miyata; Makoto Ishii; Tadatsugu Minami

doi:10.1016/s0040-6090(03)00463-2

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Transparent conducting V-co-doped AZO thin films prepared by magnetron sputtering

Shingo Suzuki Toshihiro Miyata Makoto Ishii Tadatsugu Minami

Year: 2003 Journal: Thin Solid Films Vol: 434 (1-2)Pages: 14-19 Publisher: Elsevier BV

DOI: 10.1016/s0040-6090(03)00463-2

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Keywords:

Doping Materials science Sputter deposition Electrical resistivity and conductivity Thin film Sputtering Etching (microfabrication) Substrate (aquarium) Impurity Analytical Chemistry (journal) Vanadium Cavity magnetron Chemical engineering Optoelectronics Nanotechnology Chemistry Metallurgy Organic chemistry

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ZnO doping and properties

Physical Sciences → Materials Science → Materials Chemistry

Gas Sensing Nanomaterials and Sensors

Physical Sciences → Engineering → Electrical and Electronic Engineering

Electronic and Structural Properties of Oxides

Physical Sciences → Materials Science → Materials Chemistry

Transparent conducting V-co-doped AZO thin films prepared by magnetron sputtering

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