Aberration-free dynamic focusing with a multichannel micromachined membrane deformable mirror

Abstract

We demonstrate aberration-free dynamic focusing with a low-cost 19-channel continuous-surface micromachined membrane deformable mirror (MMDM). A lookup table of the optimum control voltages for various focal lengths is obtained with an adaptive optics algorithm. Diffraction-limited imaging resolution is achieved owing to the capability of the MMDM for aberration compensation. The measured speed of the MMDM supports dynamic focusing operations at several hundred hertz. Our dynamic focusing approach is shown to function with either monochromatic or broadband optical sources.