Fabrication of high aspect ratio nanostructures on 3D surfaces

T. Senn; Juan Pablo Esquivel; N. Sabaté; Bernd Löchel

doi:10.1016/j.mee.2011.05.004

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JOURNAL ARTICLE

Fabrication of high aspect ratio nanostructures on 3D surfaces

T. Senn Juan Pablo Esquivel N. Sabaté Bernd Löchel

Year: 2011 Journal: Microelectronic Engineering Vol: 88 (9)Pages: 3043-3048 Publisher: Elsevier BV

DOI: 10.1016/j.mee.2011.05.004

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Keywords:

Materials science Thermoforming Contact angle Fabrication Thermoplastic Molding (decorative) Composite material Nanostructure Microchannel Substrate (aquarium) Aspect ratio (aeronautics) FOIL method Lithography PDMS stamp Resist Polymer Wetting Nanotechnology Layer (electronics) Optoelectronics

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Surface Modification and Superhydrophobicity

Physical Sciences → Materials Science → Surfaces, Coatings and Films

Nanofabrication and Lithography Techniques

Physical Sciences → Engineering → Biomedical Engineering

Adhesion, Friction, and Surface Interactions

Physical Sciences → Engineering → Mechanics of Materials

Fabrication of high aspect ratio nanostructures on 3D surfaces

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