Visible Luminescence in Si/SiO<sub>2</sub> Superlattices

D. J. Lockwood; J.‐M. Baribeau; P. D. Grant; H. J. Labbé; Zheng‐Hong Lu; J. Stapledon; Brian Sullivan

doi:10.1557/proc-452-183

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Visible Luminescence in Si/SiO₂ Superlattices

D. J. Lockwood J.‐M. Baribeau P. D. Grant H. J. Labbé Zheng‐Hong Lu J. Stapledon Brian Sullivan

Year: 1996 Journal: MRS Proceedings Vol: 452 Publisher: Cambridge University Press

DOI: 10.1557/proc-452-183

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Keywords:

Materials science Superlattice Photoluminescence Amorphous solid Plasma-enhanced chemical vapor deposition Sputter deposition Optoelectronics Cathodoluminescence Molecular beam epitaxy Annealing (glass) Luminescence Epitaxy Thin film Chemical vapor deposition Sputtering Layer (electronics) Nanotechnology Crystallography Composite material

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Silicon Nanostructures and Photoluminescence

Physical Sciences → Materials Science → Materials Chemistry

Thin-Film Transistor Technologies

Physical Sciences → Engineering → Electrical and Electronic Engineering

Semiconductor materials and devices

Physical Sciences → Engineering → Electrical and Electronic Engineering

Visible Luminescence in Si/SiO₂ Superlattices

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Visible Luminescence in Si/SiO2 Superlattices

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