Laser-assisted direct writing of strain sensitive silicon resistors

Jaakko Lenkkeri; S. Leppävuori

doi:10.1016/0924-4247(90)87079-x

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Laser-assisted direct writing of strain sensitive silicon resistors

Jaakko Lenkkeri S. Leppävuori

Year: 1990 Journal: Sensors and Actuators A Physical Vol: 23 (1-3)Pages: 1011-1014 Publisher: Elsevier BV

DOI: 10.1016/0924-4247(90)87079-x

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Keywords:

Materials science Diborane Silicon Silane Sapphire Optoelectronics PMOS logic Gauge factor Substrate (aquarium) Laser Composite material Optics Boron Chemistry Transistor Electrical engineering

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Advanced MEMS and NEMS Technologies

Physical Sciences → Engineering → Electrical and Electronic Engineering

Advanced Surface Polishing Techniques

Physical Sciences → Engineering → Biomedical Engineering

Laser Material Processing Techniques

Physical Sciences → Engineering → Computational Mechanics

Laser-assisted direct writing of strain sensitive silicon resistors

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