Effect of annealing on electrical and optical properties of RF magnetron sputtered indium tin oxide films

Wen-Fa Wu; Sien Chi

doi:10.1016/0169-4332(93)90233-2

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Effect of annealing on electrical and optical properties of RF magnetron sputtered indium tin oxide films

Wen-Fa Wu Sien Chi

Year: 1993 Journal: Applied Surface Science Vol: 68 (4)Pages: 497-504 Publisher: Elsevier BV

DOI: 10.1016/0169-4332(93)90233-2

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Keywords:

Annealing (glass) Materials science Indium tin oxide Electrical resistivity and conductivity Tin Indium Sputter deposition Band gap Oxide Cavity magnetron Infrared Refractive index Optoelectronics Analytical Chemistry (journal) Sputtering Thin film Metallurgy Optics Nanotechnology Chemistry

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ZnO doping and properties

Physical Sciences → Materials Science → Materials Chemistry

Gas Sensing Nanomaterials and Sensors

Physical Sciences → Engineering → Electrical and Electronic Engineering

Transition Metal Oxide Nanomaterials

Physical Sciences → Materials Science → Polymers and Plastics

Effect of annealing on electrical and optical properties of RF magnetron sputtered indium tin oxide films

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