Electret based capacitive MEMS vibration-to-electric energy harvesting

Abstract

With the advent of new techniques in ultra-low VLSI design and new MEMS technologies, self-powered systems prove to be a solution to wireless sensor networks with low accessibility for maintenance. This paper includes a new concept for power scavenging based on capacitive MEMS structure. The concept, mathematically proven through MATLAB simulations, is innovative as it does not require any initial or external electrical power supply.