Pulsed Laser Deposition of Ferroelectric Multilayer Capacitors YBa2Cu3O7−δ/BaTiO3/YBa2Cu3O7−δ on Si(100) Substrates

Junjie Luo; Q. Li; D. B. Fenner; S. Liu; W.D. Hamblen; Xin Wu

doi:10.1557/proc-361-539

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Pulsed Laser Deposition of Ferroelectric Multilayer Capacitors YBa₂Cu₃O_7−δ/BaTiO₃/YBa₂Cu₃O_7−δ on Si(100) Substrates

Junjie Luo Q. Li D. B. Fenner S. Liu W.D. Hamblen Xin Wu

Year: 1994 Journal: MRS Proceedings Vol: 361 Publisher: Cambridge University Press

DOI: 10.1557/proc-361-539

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Keywords:

Materials science Ferroelectricity Dielectric Pulsed laser deposition Capacitor Layer (electronics) Substrate (aquarium) Deposition (geology) Analytical Chemistry (journal) Permittivity Thin film Optoelectronics Composite material Nanotechnology Voltage Electrical engineering

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ZnO doping and properties

Physical Sciences → Materials Science → Materials Chemistry

Ferroelectric and Piezoelectric Materials

Physical Sciences → Materials Science → Materials Chemistry

Semiconductor materials and devices

Physical Sciences → Engineering → Electrical and Electronic Engineering

Pulsed Laser Deposition of Ferroelectric Multilayer Capacitors YBa₂Cu₃O_7−δ/BaTiO₃/YBa₂Cu₃O_7−δ on Si(100) Substrates

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